3d comsol multiphysics mems module v3.5  (COMSOL Inc)

Journal: Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems

Article Title: Mechanical Evaluation of Unobstructing Magnetic Microactuators for Implantable Ventricular Catheters

doi: 10.1109/JMEMS.2014.2321377

Figure Lengend Snippet: A set of 3D schematic diagrams of the torsional magnetic microactuators: (a) unactuated released state, (b) actuated device with an applied magnetic field, (c) a schematic of the proposed MEMS-enabled ventricular catheter.

Article Snippet: Using the parameters listed on , the resonant frequency of a sample device was calculated to be approximately 53.7 Hz. table ft1 table-wrap mode="anchored" t5 TABLE III caption a7 Beam Length 600 μ m Beam Width 20 μ m Beam Thickness 1.1 μ m Beam Elastic Modulus 250 MPa Structural Plate Area 1.3 × 10 6 μ m 2 Structural Plate Density 7800 kg/m Magnet Volume 8.1 × 10 6 μ m 3 Magnet Density 3100 kg/m Open in a separate window Resonant Frequency Simulation Parameters b) Numerical analysis The dynamic response of cantilever-based magnetic microactuators can also be simulated using a 3D COMSOL Multiphysics MEMS module (v3.5 COMSOL, Inc., Los Angeles, CA, USA).

Techniques: